Modul
Microfabrication [M-MACH-101291]
Credits
9Recurrence
Jedes SemesterDuration
1 SemesterLanguage
GermanLevel
4Version
3Organisation
- KIT-Fakultät für Maschinenbau
- Institut für Mikrostrukturtechnik
Bricks
| Identifier | Name | LP |
|---|---|---|
| T-MACH-100530 | Physics for Engineers | 6 |
| T-MACH-105556 | Practical Course Polymers in MEMS | 3 |
| T-MACH-102192 | Polymers in MEMS A: Chemistry, Synthesis and Applications | 3 |
| T-MACH-102167 | Nanotribology and -Mechanics | 3 |
| T-MACH-109122 | X-ray Optics | 4 |
| T-MACH-102164 | Practical Training in Basics of Microsystem Technology | 3 |
| T-MACH-108312 | Introduction to Microsystem Technology - Practical Course | 4 |
| T-MACH-102191 | Polymers in MEMS B: Physics, Microstructuring and Applications | 3 |
| T-MACH-102200 | Polymers in MEMS C: Biopolymers and Bioplastics | 3 |
| T-MACH-102166 | Fabrication Processes in Microsystem Technology | 3 |
Competence Certificate
The assessment is carried out as partial exams
(according to Section 4 (2), 1-3 SPO) of the core course and further single courses of this module, whose sum of credits must meet the minimum requirement of credits of this module. The assessment procedures are described for each course of the module separately.
The overall grade of the module is the average of the grades for each course weighted by the credits and truncated after the first decimal.
Competence Goal
The student
- gains advanced knowledge concerning fabrication techniques in micrometer scale
- aquires knowledge in up-to-date developing research
- can detect and use causal relation in microfabrication process chains.
Prerequisites
none
Content
This engineering module allows the student to gain advanced knowledge in the area of microfabrication. Different manufacturing methods are described and analyzed in an advanced manner. Necessary interdisciplinary knowledge from physics, chemistry, materials science and also up-to-date developments (nano and x-ray optics) in micro fabrication is offered.
Workload
270 hours